| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: Burn J. Lin |
| Title | Optical/Laser Microlithography: 2-4 March 1988, Santa Clara, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1988 |
| Languages | eng |
| Isbn | 0892529571 |
| Series | SPIE Proceedings |
| Volume | 922 |
| Description | viii, 486 p. ill. 28 cm. |
| Record date | 20130902 |
| Location | Bellingham, Wash. |