Shelfclass_id | S/SPIE |
Sortkey | S/SPIE |
Authors | RĂ©gine G. Tarascon-Auriol |
Title | Advances in Resist Technology and Processing XIV: 10-12 March 1997, Santa Clara, California |
Publisher | SPIE Optical Engineering Press |
Year | 1997 |
Languages | eng |
Isbn | 0819424633 |
Series | SPIE Proceedings |
Volume | 3049 |
Issn | 99-0108644 |
Description | 1028 s. |
Record date | 20100817 |
Location | Bellingham, Wash., USA |