| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Régine G. Tarascon-Auriol |
| Title | Advances in Resist Technology and Processing XIV: 10-12 March 1997, Santa Clara, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1997 |
| Languages | eng |
| Isbn | 0819424633 |
| Series | SPIE Proceedings |
| Volume | 3049 |
| Issn | 99-0108644 |
| Description | 1028 s. |
| Record date | 20100817 |
| Location | Bellingham, Wash., USA |