| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: Diana Nyyssonen |
| Title | Integrated Circuit Metrology II: May 3-4, 1984, Arlington, Virginia |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1984 |
| Languages | eng |
| Isbn | 0892525150 |
| Series | SPIE Proceedings |
| Volume | 480 |
| Description | vi, 172 p. 28 cm. |
| Record date | 20130828 |
| Location | Bellingham, Wash. |