| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Alexander M. Prokhorov, Vladimir I. Pustovoy |
| Title | ALT '94 International Conference: Laser Methods of Surface Treatment and Modification |
| Publisher | SPIE Optical Engineering Press |
| Year | 1995 |
| Languages | eng |
| Isbn | 0819418552 |
| Series | SPIE Proceedings |
| Volume | 2498 |
| Description | 250 s. |
| Record date | 20090728 |
| Location | Bellingham, Wash., USA |
| Keywords | Microelectronics, Microlithography, Superconductors, Laserteknik, Laser technology, Konferenspublikationer, Conference proceedings |