| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Derek Abbott, Vijay K. Varadan, Karl F. Boehringer |
| Title | Smart Electronics and MEMS II: 13-15 December 2000, Melbourne, Australia |
| Publisher | Spie |
| Year | 2001 |
| Languages | eng |
| Isbn | 081943910X |
| Series | SPIE Proceedings |
| Volume | 4236 |
| Description | li, 364 p. ill. 28 cm. |
| Record date | 20090820 |
| Location | Bellingham, Wash., USA |
| Keywords | Microelectromechanical systems, Microelectronics, Smart materials, Electromechanical devices |