| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: Ting Shan Luk |
| Title | Excimer Lasers and Optics: 18-19 September 1986, Cambridge, Massachusetts |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1987 |
| Languages | eng |
| Isbn | 0892527455 |
| Series | SPIE Proceedings |
| Volume | 710 |
| Description | vi, 150 p. ill. 28 cm. |
| Record date | 20130831 |
| Location | Bellingham, Wash. |