| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Ghanim A. Al-Jumaily, Angela Duparré, Bhanwar Singh |
| Title | Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries: 30-31 July 2000, San Diego, USA |
| Publisher | SPIE Optical Engineering Press |
| Year | 2000 |
| Languages | eng |
| Isbn | 0819437441 |
| Series | SPIE Proceedings |
| Volume | 4099 |
| Issn | 99-0108644 |
| Description | 328 s. |
| Record date | 20100819 |
| Location | Bellingham, Wash., USA |