| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Ahsan Hariz, Vijay K. Varadan, Olaf Reinhold |
| Title | Smart Electronics and MEMS: 11-13 December 1997, Adelaide, Australia |
| Publisher | SPIE Optical Engineering Press |
| Year | 1997 |
| Languages | eng |
| Isbn | 0819426806 |
| Series | SPIE Proceedings |
| Volume | 3242 |
| Issn | 99-0108644 |
| Description | 398 s. |
| Record date | 20100818 |
| Location | Bellingham, Wash., USA |