| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | James A. Bondur, Kiefer Elliot, John R. Hauser, Dim-Lee Kwong, Asit K. Ray |
| Title | Microelectronic Processes, Sensors, and Controls: 27-29 September 1993, Monterey, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1994 |
| Languages | eng |
| Isbn | 0819413623 |
| Series | SPIE Proceedings |
| Volume | 2091 |
| Description | 462 s. |
| Record date | 20090724 |
| Location | Bellingham, Wash., USA |
| Keywords | Kiselsensorer (Mätteknik), Silicon sensors (Measurements) (Engineering), Mikroelektronik, Microelectronics, Sensorer (Precisionsinstrument), Sensors (Precision instruments), Konferenspublikationer, Conference proceedings |