| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Vadim P. Veiko |
| Title | Laser-Assisted Micro- and Nanotechnologies 2003: 29 June - 3 July 2003, St. Petersburg, Russia |
| Publisher | SPIE Optical Engineering Press |
| Year | 2004 |
| Languages | eng |
| Isbn | 0819453226 |
| Series | SPIE Proceedings |
| Volume | 5399 |
| Issn | 1047-9899 |
| Record date | 20100825 |
| Location | Palos Verdes Estates, California |