| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | N. Balasubramanian, James C. Wyant |
| Title | Advances in Optical Metrology: August 28-29, 1978, San Diego, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1978 |
| Languages | eng |
| Isbn | 0892521805 |
| Series | SPIE Proceedings |
| Volume | 153 |
| Issn | 99-0108644 |
| Description | 166 s. ill., tab. |
| Record date | 20100805 |
| Udk | 621.317 |
| Location | Bellingham, Wash. |