| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Dinesh K. Sood, Ajay P. Malshe, Ryutaro Maeda |
| Title | Nano- and Microtechnology: Materials, Processes, Packaging, and Systems: 16-18 December 2002, Melbourne, Australia |
| Publisher | SPIE Optical Engineering Press |
| Year | 2002 |
| Languages | eng |
| Isbn | 0819447315 |
| Series | SPIE Proceedings |
| Volume | 4936 |
| Issn | 99-0108644 |
| Description | 476 s. |
| Record date | 20100823 |
| Location | Bellingham, Wash., USA |