| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Barbara Vasquez, Anant Sabnis, Kenneth P. MacWilliams, Jason C. S. Woo |
| Title | Microelectronics Manufacturing and Reliability: 21-22 September 1992, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1993 |
| Languages | eng |
| Isbn | 0819410004 |
| Series | SPIE Proceedings |
| Volume | 1802 |
| Issn | 99-0108644 |
| Description | 258 s. |
| Record date | 20100811 |
| Location | Bellingham, Wash., USA |
| Keywords | Elektroniktillverkning, Electronic manufacturing, Mikroelektronik, Microelectronics, Mikroelektronik i industrin, Microelectronics in industry, Konferenspublikationer, Conference proceedings |