| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Cecil J. Davis, Irving P. Herman, Terry R. Turner |
| Title | Process Module Metrology, Control, and Clustering: 11-13 September 1991, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1992 |
| Languages | eng |
| Isbn | 0819407259 |
| Series | SPIE Proceedings |
| Volume | 1594 |
| Issn | 99-0108644 |
| Description | 419 s. |
| Record date | 20100810 |
| Location | Bellingham, Wash., USA |
| Keywords | Semiconductor devices, Thin film processing, Mikroelektronik, Microelectronics, Konferenspublikationer, Conference proceedings |