Shelfclass_id |
S/SPIE |
Sortkey |
S/SPIE |
Authors |
Cecil J. Davis, Irving P. Herman, Terry R. Turner |
Title |
Process Module Metrology, Control, and Clustering: 11-13 September 1991, San Jose, California |
Publisher |
SPIE Optical Engineering Press |
Year |
1992 |
Languages |
eng |
Isbn |
0819407259 |
Series |
SPIE Proceedings |
Volume |
1594 |
Issn |
99-0108644 |
Description |
419 s. |
Record date |
20100810 |
Location |
Bellingham, Wash., USA |
Keywords |
Semiconductor devices, Thin film processing, Mikroelektronik, Microelectronics, Konferenspublikationer, Conference proceedings |