| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Gene E. Fuller |
| Title | Optical Microlithography X: 12-14 March 1997, Santa Clara, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1997 |
| Languages | eng |
| Isbn | 081942465X |
| Series | SPIE Proceedings |
| Volume | 3051 |
| Issn | 99-0108644 |
| Description | 982 s. |
| Record date | 20100817 |
| Location | Bellingham, Wash., USA |