| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Winfried M. Kaiser, Richard H. Stulen |
| Title | Soft X-Ray and EUV Imaging Systems: 3-4 August 2000, San Diego, USA |
| Publisher | Spie |
| Year | 2000 |
| Languages | eng |
| Isbn | 0819437913 |
| Series | SPIE Proceedings |
| Volume | 4146 |
| Description | 178 s. |
| Record date | 20090819 |
| Location | Bellingham, WA |
| Keywords | Ultraviolett strålning, Röntgenteknik, Röntgenstrålning, Teknisk optik, Optoelektronik |