| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Luc Van den Hove |
| Title | Optical Microlithography XII: Part 2/2: 17-19 March 1999, Santa Clara, California |
| Publisher | Spie |
| Year | 1999 |
| Languages | eng |
| Isbn | 0819431532 |
| Series | SPIE Proceedings |
| Volume | 3679:2/2 |
| Issn | 1047-9899 |
| Description | 2 v. ill. 28 cm. |
| Record date | 20100819 |
| Location | Bellingham, Wash. |
| Keywords | Integrated circuits, Microlithography, X-ray lithography, Manufacturing processes |