| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Vadim P. Veiko |
| Title | Laser-Assisted Microtechnology 2000: 23-25 August 2000, St. Petersburg-Pushkin, Russia |
| Publisher | Spie |
| Year | 2001 |
| Languages | eng |
| Isbn | 0819438138 |
| Series | SPIE Proceedings |
| Volume | 4157 |
| Issn | 1047-9899 |
| Description | x, 306 p. ill. 25 cm. |
| Record date | 20100820 |
| Location | Bellingham, Wash., USA |
| Nlmed | TK7836 |
| Keywords | Electronic industries, Lasers, Manufacturing processes, Micromachining |