| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Mark Rodder, Toshiaki Tsuchiya, David Burnett, Dirk Wristers |
| Title | Microelectronic Device Technology: 1-2 October 1997, Austin, Texas |
| Publisher | SPIE Optical Engineering Press |
| Year | 1997 |
| Languages | eng |
| Isbn | 081942644X |
| Series | SPIE Proceedings |
| Volume | 3212 |
| Description | 398 s. |
| Record date | 20090731 |
| Location | Bellingham, Wash., USA |