| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Vijay K. Varadan |
| Title | Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnologyq: 15-18 March 2004, San Diego, California, USA |
| Publisher | SPIE Optical Engineering Press |
| Year | 2004 |
| Languages | eng |
| Isbn | 0819453064 |
| Series | SPIE Proceedings |
| Volume | 5389 |
| Issn | 1047-9899 |
| Record date | 20100825 |
| Location | Palos Verdes Estates, California |