| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Harold G. Craighead, J. Narayan |
| Title | Advanced Processing of Semiconductor Devices II: 17-18 March 1988, Newport Beach, California |
| Publisher | Spie |
| Year | 1988 |
| Languages | eng |
| Isbn | 0892529806 |
| Series | SPIE Proceedings |
| Volume | 945 |
| Description | viii, 164 p. ill. 28 cm. |
| Record date | 20090824 |
| Location | Bellingham, Wash., USA |
| Keywords | Semiconductors |