| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Orest J. Glembocki |
| Title | Spectroscopic Characterization Techniques for Semiconductor Technology IV: 25-26 March 1992, Somerset, New Jersey |
| Publisher | SPIE Optical Engineering Press |
| Year | 1992 |
| Languages | eng |
| Isbn | 0819408395 |
| Series | SPIE Proceedings |
| Volume | 1678 |
| Description | 308 s. |
| Record date | 20090722 |
| Location | Bellingham, Wash., USA |
| Keywords | Photoluminescence spectroscopy, Raman scattering spectroscopy, Laser Spectroscopy, Ellipsometry, Spektrokemisk analys, Spectrochemical analysis, Halvledarteknik, Semiconductor engineering, Konferenspublikationer, Conference proceedings |