| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Elizabeth A. Dobisz |
| Title | Nanofabrication Technologies: 3-4 August 2003, San Diego, California, USA |
| Publisher | SPIE Optical Engineering Press |
| Year | 2003 |
| Languages | eng |
| Isbn | 0819450936 |
| Series | SPIE Proceedings |
| Volume | 5220 |
| Issn | 1047-9899 |
| Record date | 20100825 |
| Location | Palos Verdes Estates, California |