| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Vijay K. Varadan |
| Title | Smart Structures and Materials 1999: Smart Electronics and MEMS: 1-3 March 1999, Newport Beach, California |
| Publisher | Spie |
| Year | 1999 |
| Languages | eng |
| Isbn | 0819431478 |
| Series | SPIE Proceedings |
| Volume | 3673 |
| Issn | 1047-9899 |
| Description | viii, 382 p. ill. 28 cm. |
| Record date | 20100818 |
| Location | Bellingham, Wash., USA |
| Nlmed | TA418.9 |
| Keywords | Microelectronics, Smart materials, Microelectromechanical systems, Actuators |