| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Émile J. Knystautas, Wiley P. Kirk, Valerie Browning |
| Title | Engineering Thin Films with Ion Beams, Nanoscale Diagnostics, and Molecular Manufacturing: 30-31 July 2001, San Diego, USA |
| Publisher | Spie |
| Year | 2001 |
| Languages | eng |
| Isbn | 0819441821 |
| Series | SPIE Proceedings |
| Volume | 4468 |
| Issn | 1047-9899 |
| Description | ix, 192 p. ill. 28 cm. |
| Record date | 20100820 |
| Location | Bellingham, Wash., USA |
| Nlmed | TA418.9.T45 |
| Keywords | Thin films, Ion bombardment, Molecular electronics |