| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Michael T. Postek |
| Title | Integrated Circuit Metrology, Inspection, and Process Control VII: 2-4 March 1993, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1993 |
| Languages | eng |
| Isbn | 0819411604 |
| Series | SPIE Proceedings |
| Volume | 1926 |
| Issn | 99-0108644 |
| Description | 594 s. |
| Record date | 20100813 |
| Location | Bellingham, Wash., USA |
| Keywords | Submicrometer metrology, Optical microscope metrology, Scanning probe metrology, Optical lithography, Thin film metrology, Automatisk mätteknik (Elektronik), Automatic measurements (Electronic engineering), Integrerade kretsar, Integrated circuits, Konferenspublikationer, Conference proceedings |