| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editors: Divyesh N. Patel, Mart Graef |
| Title | Multilevel Interconnect Technology: 1-2 October 1997, Austin, Texas |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1997 |
| Languages | eng |
| Isbn | 081942546X |
| Series | SPIE Proceedings |
| Volume | 3214 |
| Issn | 0277-786X |
| Description | vii, 132 p. ill. 28 cm. |
| Record date | 20130909 |
| Location | Bellingham, Wash. |