Shelfclass_id | S/SPIE |
Sortkey | S/SPIE |
Authors | Editors: Divyesh N. Patel, Mart Graef |
Title | Multilevel Interconnect Technology: 1-2 October 1997, Austin, Texas |
Publisher | SPIE - The International Society for Optical Engineering |
Year | 1997 |
Languages | eng |
Isbn | 081942546X |
Series | SPIE Proceedings |
Volume | 3214 |
Issn | 0277-786X |
Description | vii, 132 p. ill. 28 cm. |
Record date | 20130909 |
Location | Bellingham, Wash. |