| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Luc Van den Hove |
| Title | Optical Microlithography XI: 25-27 February 1998, Santa Clara, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1998 |
| Languages | eng |
| Isbn | 0819427799 |
| Series | SPIE Proceedings |
| Volume | 3334 |
| Issn | 99-0108644 |
| Description | 1090 s. |
| Record date | 20100818 |
| Location | Bellingham, Wash., USA |