| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Ian W. Boyd, Masamitsu Haruna, Hubert Jerominek, Vitaly I. Konov, Gary L. Loper, Martin C. Peckerar, Dennis L. Polla |
| Title | Laser-Assisted Fabrication of Thin Films and Microstructures: 17-19 August 1993, Québec, Canada |
| Publisher | SPIE Optical Engineering Press |
| Year | 1994 |
| Languages | eng |
| Isbn | 0819413046 |
| Series | SPIE Proceedings |
| Volume | 2045 |
| Description | 366 s. |
| Record date | 20090724 |
| Location | Bellingham, Wash., USA |
| Keywords | Laser-assisted fabrication, Laserteknik (Mikroelektronik), Laser technology (Microelectronics\), Tunna skikt (Mikroelektronik), Thin films (Microelectronics), Konferenspublikationer, Conference proceedings |