Shelfclass_id |
S/SPIE |
Sortkey |
S/SPIE |
Authors |
Barbara Vasquez, Hisao Kawasaki |
Title |
Microelectronics Manufacturability, Yield, and Reliability: 20-21 October 1994, Austin, Texas |
Publisher |
SPIE Optical Engineering Press |
Year |
1994 |
Languages |
eng |
Isbn |
0819416673 |
Series |
SPIE Proceedings |
Volume |
2334 |
Issn |
99-0108644 |
Description |
348 s. |
Record date |
20100813 |
Location |
Bellingham, Wash., USA |
Keywords |
JC, Yield, Reliability, Diagnostics, Tillverkning av integrerade kretsar, Manufacture of integrated circuits, Konferenspublikationer, Conference proceedings |