| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Barbara Vasquez, Hisao Kawasaki |
| Title | Microelectronics Manufacturability, Yield, and Reliability: 20-21 October 1994, Austin, Texas |
| Publisher | SPIE Optical Engineering Press |
| Year | 1994 |
| Languages | eng |
| Isbn | 0819416673 |
| Series | SPIE Proceedings |
| Volume | 2334 |
| Issn | 99-0108644 |
| Description | 348 s. |
| Record date | 20100813 |
| Location | Bellingham, Wash., USA |
| Keywords | JC, Yield, Reliability, Diagnostics, Tillverkning av integrerade kretsar, Manufacture of integrated circuits, Konferenspublikationer, Conference proceedings |