| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Shih-Chia Chang, Stella W. Pang |
| Title | Micromachining and Microfabrication Process Technology III: 29-30 September 1997, Austin, Texas |
| Publisher | SPIE Optical Engineering Press |
| Year | 1997 |
| Languages | eng |
| Isbn | 0819426555 |
| Series | SPIE Proceedings |
| Volume | 3223 |
| Issn | 99-0108644 |
| Description | 310 s. |
| Record date | 20100817 |
| Location | Bellingham, Wash., USA |