| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editors: J. M. Graf, William Converse |
| Title | Technological Advances in Micro and Submicro Photofabrication Imagery: August 21-23, 1974, San Diego, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1975 |
| Languages | eng |
| Series | SPIE Proceedings |
| Volume | 55 |
| Description | viii, 136 p. 28 cm. |
| Record date | 20130822 |
| Location | Bellingham, Wash. |