| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Fred Payne, Ash M. Parameswaran |
| Title | Education in Microelectronics and MEMS: 28-29 October 1999, Royal Pines Resort, Queensland, Australia |
| Publisher | SPIE Optical Engineering Press |
| Year | 1999 |
| Languages | eng |
| Isbn | 0819434957 |
| Series | SPIE Proceedings |
| Volume | 3894 |
| Description | 178 s. |
| Record date | 20090806 |
| Location | Bellingham, Wash., USA |