| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | John K. Lowell, Ray T. Chen, Jagdish P. Mathur |
| Title | Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II: 25-26 October 1995, Austin, Texas |
| Publisher | SPIE Optical Engineering Press |
| Year | 1995 |
| Languages | eng |
| Isbn | 0819420042 |
| Series | SPIE Proceedings |
| Volume | 2638 |
| Issn | 99-0108644 |
| Description | 302 s. |
| Record date | 20100816 |
| Location | Bellingham, Wash., USA |
| Keywords | Microelectronic devices, Tillverkning av integrerade kretsar, Manufacture of integrated circuits, Konferenspublikationer, Conference proceedings |