| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Dim-Lee Kwong, Heinrich G. Müller |
| Title | Rapid Thermal and Laser Processing: 24-25 September 1992, San Jose, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1993 |
| Languages | eng |
| Isbn | 0819410020 |
| Series | SPIE Proceedings |
| Volume | 1804 |
| Description | 167 s. |
| Record date | 20090722 |
| Location | Bellingham, Wash., USA |
| Keywords | RTP, Laser ablation, Termisk bearbetning (Halvledarteknik), Thermal processing (Semiconductor engineering), Laserteknik (Halvledarteknik), Laser technology (Semiconductor engineering), Laserteknik (Tryckta kretsar), Laser technology (Printed circuits), Termisk bearbetning (Tryckta kretsar), Thermal processing (Printed circuits), Konferenspublikationer, Conference proceedings |