| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Philip T. C. Chen, O. Manuel Uy |
| Title | Optical Systems Contamination: Effects, Measurements, and Control VII: 9-11 July 2002, Seattle, USA |
| Publisher | SPIE Optical Engineering Press |
| Year | 2002 |
| Languages | eng |
| Isbn | 081944541X |
| Series | SPIE Proceedings |
| Volume | 4774 |
| Issn | 99-0108644 |
| Description | 282 s. |
| Record date | 20100823 |
| Location | Bellingham, Wash., USA |