| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: Alfred Wagner |
| Title | Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lighographies III: March 15-16, 1984, Santa Clara, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1984 |
| Languages | eng |
| Isbn | 0892525061 |
| Series | SPIE Proceedings |
| Volume | 471 |
| Description | vi, 136 p. 28 cm. |
| Record date | 20130828 |
| Location | Bellingham, Wash. |