| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Vijay K. Varadan, Paul J. McWhorter |
| Title | Smart Structures and Materials 1996: Smart Electronics and MEMS: 28-29 February 1996, San Diego, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1996 |
| Languages | eng |
| Isbn | 0819420972 |
| Series | SPIE Proceedings |
| Volume | 2722 |
| Description | 274 s. |
| Record date | 20090728 |
| Location | Bellingham, Wash., USA |
| Keywords | Microsensors, Mikromaskinbearbetning, Micromachining |