| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: Harry L. Stover |
| Title | Optical Microlithography Technology for the Mid-1980s: March 31-Apri 1, 1982, Santa Clara, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1982 |
| Languages | eng |
| Isbn | 0892523697 |
| Series | SPIE Proceedings |
| Volume | 334 |
| Description | viii, 265 p. 28 cm. |
| Record date | 20130826 |
| Location | Bellingham, Wash. |