| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | David Burnett, Dirk Wristers, Toshiaki Tsuchiya |
| Title | Microelectronic Device Technology II: 23-24 September 1998, Santa Clara, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1998 |
| Languages | eng |
| Isbn | 0819429651 |
| Series | SPIE Proceedings |
| Volume | 3506 |
| Description | 356 s. |
| Record date | 20090804 |
| Location | Bellingham, Wash., USA |