| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | M. E. Motamedi, Rolf Goering |
| Title | Miniaturized Systems with Micro-Optics and MEMS: 20-22 September 1999, Santa Clara, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1999 |
| Languages | eng |
| Isbn | 0819434752 |
| Series | SPIE Proceedings |
| Volume | 3878 |
| Description | 426 s. |
| Record date | 20090806 |
| Location | Bellingham, Wash., USA |