| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Vijay K. Varadan, Laszlo B. Kish |
| Title | Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology: 3-5 March 2003, San Diego, California, USA |
| Publisher | SPIE Optical Engineering Press |
| Year | 2003 |
| Languages | eng |
| Isbn | 0819448605 |
| Series | SPIE Proceedings |
| Volume | 5055 |
| Issn | 99-0108644 |
| Description | 394 s. |
| Record date | 20100823 |
| Location | Bellingham, Wash., USA |