| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Neil W. Bergmann, Olaf Reinhold, Norman C. Tien |
| Title | Electronics and Structures for MEMS: 27-29 October 1999, Royal Pines Resort, Queensland, Australia |
| Publisher | SPIE Optical Engineering Press |
| Year | 1999 |
| Languages | eng |
| Isbn | 0819434922 |
| Series | SPIE Proceedings |
| Volume | 3891 |
| Description | 428 s. |
| Record date | 20090806 |
| Location | Bellingham, Wash., USA |