Shelfclass_id | S/SPIE |
Sortkey | S/SPIE |
Authors | Editors: Michael I. Current, Devendra K. Sadana |
Title | Advanced Applications of Ion Implantation: January 23-25, 1985, Los Angeles, California |
Publisher | SPIE - The International Society for Optical Engineering |
Year | 1985 |
Languages | eng |
Isbn | 0892525657 |
Series | SPIE Proceedings |
Volume | 530 |
Description | vi, 263 p. ill. 28 cm. |
Record date | 20130828 |
Location | Bellingham, Wash. |