| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editors: Michael I. Current, Devendra K. Sadana |
| Title | Advanced Applications of Ion Implantation: January 23-25, 1985, Los Angeles, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1985 |
| Languages | eng |
| Isbn | 0892525657 |
| Series | SPIE Proceedings |
| Volume | 530 |
| Description | vi, 263 p. ill. 28 cm. |
| Record date | 20130828 |
| Location | Bellingham, Wash. |