| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Bruce W. Smith |
| Title | Optical Microlithography XVII: Part 3/3: 24-27 February 2004, Santa Clara, California, USA |
| Publisher | Spie |
| Year | 2004 |
| Languages | eng |
| Isbn | 0819452904 |
| Series | SPIE Proceedings |
| Volume | 5377:3/3 |
| Description | 3 v. (xxiii, 2008 p.) ill. (some col.) 28 cm. |
| Record date | 20090821 |
| Location | Bellingham, Wash., USA |
| Keywords | Integrated circuits, Microlithography, X-ray lithography, Manufacturing processes |