Shelfclass_id | S/SPIE |
Sortkey | S/SPIE |
Authors | Michael T. Postek |
Title | Microlithography and Metrology in Micromachining: 23-24 October 1995, Austin, Texas |
Publisher | SPIE Optical Engineering Press |
Year | 1995 |
Languages | eng |
Isbn | 0819420069 |
Series | SPIE Proceedings |
Volume | 2640 |
Description | 246 s. |
Record date | 20090828 |
Location | Bellingham, Wash., USA |
Keywords | Metrology, Mikrolitografi, Microlitography, Mikromaskinbearbetning, Micromachining, Konferenspublikationer, Conference proceedings |