| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Michael T. Postek |
| Title | Microlithography and Metrology in Micromachining: 23-24 October 1995, Austin, Texas |
| Publisher | SPIE Optical Engineering Press |
| Year | 1995 |
| Languages | eng |
| Isbn | 0819420069 |
| Series | SPIE Proceedings |
| Volume | 2640 |
| Description | 246 s. |
| Record date | 20090828 |
| Location | Bellingham, Wash., USA |
| Keywords | Metrology, Mikrolitografi, Microlitography, Mikromaskinbearbetning, Micromachining, Konferenspublikationer, Conference proceedings |