| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Mart Graef, Divyesh N. Patel |
| Title | Multilevel Interconnect Technology III: 22-23 September 1999, Santa Clara, California |
| Publisher | SPIE Optical Engineering Press |
| Year | 1999 |
| Languages | eng |
| Isbn | 0819434809 |
| Series | SPIE Proceedings |
| Volume | 3883 |
| Issn | 99-0108644 |
| Description | 184 s. |
| Record date | 20100819 |
| Location | Bellingham, Wash., USA |