| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | M. Edward Motamedi, Wayne Bailey |
| Title | Microelectronic Structures and MEMS for Optical Processing II: 14-15 October 1996, Austin, Texas |
| Publisher | SPIE Optical Engineering Press |
| Year | 1996 |
| Languages | eng |
| Isbn | 0819422797 |
| Series | SPIE Proceedings |
| Volume | 2881 |
| Description | 220 s. |
| Record date | 20090729 |
| Location | Bellingham, Wash., USA |
| Keywords | MEMS, Optical sensors, CRT, CLD, Teknisk optik, Applied optics |