| Shelfclass_id | S/SPIE |
| Sortkey | S/SPIE |
| Authors | Editor: Harry L. Stover |
| Title | Optical Microlithography IV: March 13-14, 1985, Santa Clara, California |
| Publisher | SPIE - The International Society for Optical Engineering |
| Year | 1985 |
| Languages | eng |
| Isbn | 0892525378 |
| Series | SPIE Proceedings |
| Volume | 538 |
| Description | vi, 260 p. ill. 28 cm. |
| Record date | 20130828 |
| Location | Bellingham, Wash. |